Viktor Shel
8Patents
8h-index
10Co-inventors
58Inventor score
Filing activity: Nov 12, 1992 → May 23, 1997
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6252354A | RF tuning method for an RF plasma reactor using frequency servoing and power, voltage, current or DI/DT control | Electricity | 228 | Expired |
| US6308654A | Inductively coupled parallel-plate plasma reactor with a conical dome | Electricity | 146 | Expired |
| US5392018A | Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits | Electricity | 61 | Expired |
| US5585766A | Electrically tuned matching networks using adjustable inductance elements | Electricity | 57 | Expired |
| US5574410A | Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits | Electricity | 43 | Expired |
| US5790365A | Method and apparatus for releasing a workpiece from and electrostatic chuck | Emerging Cross-Sectional Technologies | 41 | Expired |
| US5572170A | Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits | Electricity | 20 | Expired |
| US5872456A | Apparatus for directly measuring component values within an RF circuit | Physics | 9 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.