Spin dryer and substrate drying method
US5873177A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 19, 1997 |
| Grant date | Feb 23, 1999 |
| Priority date | — |
| Expiry date | May 19, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67034
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A spin dryer for centrifugally removing water droplets attached to a plurality of substrates comprises a rotor having a main shaft formed in a lower portion, substrate holding means for holding a plurality of substrates such that main surfaces of the substrates are perpendicular to the main shaft of the rotor, the holding means being positioned in symmetry with respect to the main shaft of the rotor and rotated together with the rotor, a treating vessel surrounding the rotor and the substrate holding means, an air inlet port formed in an upper portion of the treating vessel for introducing air into the treating vessel, and an exhaust port formed in a side portion of the treating vessel in a manner to extend upward from the bottom portion of the treating vessel to reach at least the height position of the rotor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.