Patent · US Expired

Field effect transistor

US5874753A · kind A · utility

2Cited by
3References
10Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 26, 1997
Grant dateFeb 23, 1999
Priority date
Expiry dateMar 26, 2017

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D62/161
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

In a field effect transistor including active layers having a heterojunction structure with at least two different semiconductor materials, a layer for supplying electrons is disposed opposite a drain electrode, in contact with a region of the active layers including a dopant impurity producing n type conductivity. Therefore, degradation of the electrical characteristics caused by trapping of electrons in a drain ohmic contact layer due to fluorine diffusing into the semiconductor layers is suppressed by supplying electrons from the layer opposite the drain electrode, thereby improving reliability of the field effect transistor including the heterojunction structure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.