Electrostatic chuck capable of rapidly dechucking a substrate
US5880924A · kind A · utility
84Cited by
25References
32Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 1, 1997 |
| Grant date | Mar 9, 1999 |
| Priority date | — |
| Expiry date | Dec 1, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T279/23
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electrostatic chuck 20 for holding a substrate 12 comprises a dielectric 70 having a receiving surface 75 for receiving the substrate thereon. The dielectric 70 comprises a charging electrode 80 for generating electrostatic charge for electrostatically holding the substrate 12 to the receiving surface 75, and a discharge electrode 85 electrically isolated from the charging electrode for removing electrostatic charge accumulated in the chuck 20.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.