Ananda H. Kumar
96Patents
29h-index
121Co-inventors
91Inventor score
Filing activity: Feb 6, 1978 → Apr 3, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6310755A | Electrostatic chuck having gas cavity and method | Chemistry; Metallurgy | 241 | Expired |
| US7236816B2 | Biopsy and sampling needle antennas for magnetic resonance imaging-guided biopsies | Human Necessities | 212 | Expired |
| US5209817A | Selective plating method for forming integral via and wiring layers | Electricity | 212 | Expired |
| US6095084A | High density plasma process chamber | Electricity | 140 | Expired |
| US6108189A | Electrostatic chuck having improved gas conduits | Emerging Cross-Sectional Technologies | 138 | Expired |
| US5266446A | Method of making a multilayer thin film structure | Electricity | 110 | Expired |
| US4301324A | Glass-ceramic structures and sintered multilayer substrates thereof with circuit patterns of gold, silver or copper | Electricity | 93 | Expired |
| US6280584A | Compliant bond structure for joining ceramic to metal | Electricity | 91 | Expired |
| US6776873B1 | Yttrium oxide based surface coating for semiconductor IC processing vacuum chambers | Chemistry; Metallurgy | 86 | Expired |
| US5880924A | Electrostatic chuck capable of rapidly dechucking a substrate | Emerging Cross-Sectional Technologies | 84 | Expired |
| US5436412A | Interconnect structure having improved metallization | Electricity | 75 | Expired |
| US6586886B1 | Gas distribution plate electrode for a plasma reactor | Electricity | 68 | Expired |
| US6538872B1 | Electrostatic chuck having heater and method | Electricity | 66 | Expired |
| US6440221B2 | Process chamber having improved temperature control | Electricity | 61 | Expired |
| US4413061A | Glass-ceramic structures and sintered multilayer substrates thereof with circuit patterns of gold, silver or copper | Emerging Cross-Sectional Technologies | 58 | Expired |
| US6490146B2 | Electrostatic chuck bonded to base with a bond layer and method | Chemistry; Metallurgy | 58 | Expired |
| US6721162B2 | Electrostatic chuck having composite dielectric layer and method of manufacture | Emerging Cross-Sectional Technologies | 51 | Expired |
| US5196251A | Ceramic substrate having a protective coating thereon and a method for protecting a ceramic substrate | Emerging Cross-Sectional Technologies | 43 | Expired |
| US6462928B1 | Electrostatic chuck having improved electrical connector and method | Electricity | 38 | Expired |
| US7412767B2 | Microprobe tips and methods for making | Emerging Cross-Sectional Technologies | 36 | Expired |
| US6151203A | Connectors for an electrostatic chuck and combination thereof | Electricity | 36 | Expired |
| US7531077B2 | Electrochemical fabrication process for forming multilayer multimaterial microprobe structures | Physics | 35 | Active |
| US5847935A | Electronic circuit chip package | Electricity | 32 | Expired |
| US7778682B2 | Biopsy and sampling needle antennas for magnetic resonance imaging-guided biopsies | Human Necessities | 31 | Active |
| US6490144B1 | Support for supporting a substrate in a process chamber | Electricity | 31 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.