Method and apparatus for inspecting manufactured products for defects in response to in-situ monitoring
US5896294A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 11, 1997 |
| Grant date | Apr 20, 1999 |
| Priority date | — |
| Expiry date | Mar 11, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
An apparatus and method for selecting products to inspect for defects performs in-situ monitoring of a processing tool during a manufacturing processing step. The data from the in-situ monitoring for a test run of products is correlated by a neural network with data collected during inspection of the test products for defects. During a production run of products, the in-situ monitor data is provided to the neural network which, based on the input data and the correlation, predicts the values of the data that would be collected upon inspection of the products. Specific products from the production run are selected for inspection based upon the predicted values.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.