Daniel Ray Trojan
17Patents
5h-index
13Co-inventors
63Inventor score
Filing activity: Jul 25, 1997 → Jan 12, 2024
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5899798A | Low profile, low hysteresis force feedback gimbal system for chemical mechanical polishing | Performing Operations; Transporting | 52 | Expired |
| US6116990A | Adjustable low profile gimbal system for chemical mechanical polishing | Performing Operations; Transporting | 18 | Expired |
| US6368183B1 | Wafer cleaning apparatus and associated wafer processing methods | Emerging Cross-Sectional Technologies | 17 | Expired |
| US6923711B2 | Multizone carrier with process monitoring system for chemical-mechanical planarization tool | Electricity | 15 | Expired |
| US7540799B1 | System for adjusting an end effector relative to a workpiece | Performing Operations; Transporting | 6 | Active |
| US6125861A | Post-CMP wet-HF cleaning station | Emerging Cross-Sectional Technologies | 4 | Expired |
| US11904431B2 | Method and apparatus for insitu adjustment of wafer slip detection during work piece polishing | Electricity | 1 | Active |
| US12145236B2 | Containment and exhaust system for substrate polishing components | Performing Operations; Transporting | 0 | Active |
| US11685012B2 | Planarized membrane and methods for substrate processing systems | Chemistry; Metallurgy | 0 | Active |
| US12217979B2 | Temperature controlled substrate carrier and polishing components | Electricity | 0 | Active |
| US10315286B2 | Chemical mechanical planarization carrier system | Performing Operations; Transporting | 0 | Active |
| US8944887B2 | Apparatus and method for surface grinding and edge trimming workpieces | Performing Operations; Transporting | 0 | Active |
| US12023778B2 | Substrate carrier head and processing system | Performing Operations; Transporting | 0 | Active |
| US12198935B2 | Atmospheric plasma in wafer processing system optimization | Electricity | 0 | Active |
| US9390903B2 | Method and apparatus for wafer backgrinding and edge trimming on one machine | Electricity | 0 | Active |
| US11376705B2 | Chemical mechanical planarization carrier system | Performing Operations; Transporting | 0 | Active |
| US12377520B2 | Method and apparatus for insitu adjustment of wafer slip detection during work piece polishing | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.