Method and apparatus for reducing particle generation by limiting DC bias spike
US5902494A · kind A · utility
12Cited by
21References
31Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 9, 1996 |
| Grant date | May 11, 1999 |
| Priority date | — |
| Expiry date | Feb 9, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/022
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method and apparatus for preventing particles from dislodging from the interior of a process chamber by preventing DC bias spikes. Such DC bias spikes can be caused by variations in the power or pressure in a process chamber. DC bias spikes are prevented by ramping changes in the pressure at a rate which avoids the creation of such spikes. RF power is ramped down at a rate which avoids spikes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.