Energy dispersive X-ray analyzer
US5903004A · kind A · utility
33Cited by
10References
11Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Aug 14, 1997 |
| Grant date | May 11, 1999 |
| Priority date | — |
| Expiry date | Aug 14, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2442
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In an electron microscope employing an X-ray spectrometer according to the present invention, a collimator is provided in a head portion of the X-ray spectrometer and a part of the collimator is arranged in a leakage magnetic field of an objective lens included in the electron microscope, whereby the orbits of the scattering electrons are curved and hence the scattering electrons are prevented from colliding with the X-ray spectrometer to dissolve the background noises in the X-ray spectrum
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.