Integrated photocathode
US5912500A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 22, 1995 |
| Grant date | Jun 15, 1999 |
| Priority date | — |
| Expiry date | Nov 22, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J1/34
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A transferred-electron photocathode or other opto-electronic device having one light-receiving side and one electronic side, in which multiple photocathodes are processed concurrently on a wafer for front and back side contacts and anti-reflection layers. After the wafer-level processing, the individual cells are diced, and each is placed in a rectangular recess formed in a window body with the light-receptive part of the photocathode facing the window. The integration is aided by several novel processes including coining a chip recess into a window, selective etching of titanium over chromium, and using a single metal sheet member for electrically contacting the photocathode, forming part of the vacuum envelope, and providing an exterior electrical tab.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.