Electrostatic chuck with an impregnated, porous layer that exhibits the Johnson-Rahbeck effect
US5916689A · kind A · utility
160Cited by
3References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 11, 1996 |
| Grant date | Jun 29, 1999 |
| Priority date | — |
| Expiry date | Jan 11, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31699
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An electrostatic chuck including a pedestal having a conductive upper surface; and a layer of plasma-sprayed material formed on the upper surface of the pedestal and defining a surface onto which a substrate is placed during use, wherein the plasma-sprayed material exhibits the Johnson-Rahbeck effect when a bias is applied between the substrate and the pedestal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.