Patent · US Expired

Apparatus for coating substrates especially with magnetizable materials

US5922182A · kind A · utility

2Cited by

8References

9Claims

0Family size

Assignee

Balzers Prozeb-Systeme GmbH · DE

Inventors

Wolfram Maass · Gelnhausen, DE
Peter Mahler · Obertshausen, DE
Michael Scherer · Crimmitschau, DE

Key dates

Filing date	Oct 29, 1997
Grant date	Jul 13, 1999
Priority date	—
Expiry date	Oct 29, 2017

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/3426
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

In an apparatus for coating substrates (9), especially with magnetizable materials such as NiFe, with a circular, disk-shaped, rotatably supported substrate holder (3), which is subjected to an HF bias voltage, which is provided around its circumference and on the back with dark-space shield (1), and which rotates under at least one opposing cathode (7), and with a device for generating a magnetic field (13) parallel to the plane of the substrate (9), the magnetic field is generated by an electromagnet, the exciter coil of which, together with the lower part of the yoke (10), is housed in the dark-space shield (1), whereas the extended pole pieces (12, 12'), which are electrically insulated from the coil yoke (10) via the dark space gap (2), are housed in the substrate holder (3) in proximity to the substrate (9).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.