Processing apparatus
US5937223A · kind A · utility
38Cited by
4References
31Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 7, 1997 |
| Grant date | Aug 10, 1999 |
| Priority date | — |
| Expiry date | Nov 7, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/135
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A processing apparatus comprises a plurality of processing sets, each set including a transport path extending vertically, a plurality of processing sections which are provided around the transport path and each have a plurality of processing units laid one on top of another vertically, which each perform a specific process on objects, and a main transport mechanism which moves along the transport path, loads the objects on and unloads the objects from each processing unit in the plurality of processing sections, and an inter-set transport mechanism for transporting objects between the adjacent processing sets.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.