Yoichi Deguchi
19Patents
10h-index
26Co-inventors
68Inventor score
Filing activity: Aug 12, 1993 → Jun 2, 2008
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5542559A | Plasma treatment apparatus | Electricity | 143 | Expired |
| US5665167A | Plasma treatment apparatus having a workpiece-side electrode grounding circuit | Electricity | 89 | Expired |
| US5937223A | Processing apparatus | Emerging Cross-Sectional Technologies | 38 | Expired |
| US6471422B2 | Substrate processing apparatus and substrate processing method | Emerging Cross-Sectional Technologies | 38 | Expired |
| US5474641A | Processing method and apparatus thereof | Emerging Cross-Sectional Technologies | 37 | Expired |
| US6402401B1 | Substrate processing apparatus and substrate processing method | Emerging Cross-Sectional Technologies | 27 | Expired |
| US5319216A | Substrate detector with light emitting and receiving elements arranged in staggered fashion and a polarization filter | Emerging Cross-Sectional Technologies | 27 | Expired |
| US6672779B2 | Substrate processing apparatus and substrate processing method | Emerging Cross-Sectional Technologies | 24 | Expired |
| US5923915A | Method and apparatus for processing resist | Electricity | 24 | Expired |
| US6837631B2 | Substrate processing method and substrate processing apparatus | Physics | 13 | Expired |
| US6432842B1 | Coating method and coating apparatus | Performing Operations; Transporting | 9 | Expired |
| US6969829B2 | Substrate processing apparatus | Electricity | 7 | Expired |
| US6024502A | Method and apparatus for processing substrate | Emerging Cross-Sectional Technologies | 6 | Expired |
| US7667377B2 | Laminated piezoelectric element and process for producing the same | Emerging Cross-Sectional Technologies | 6 | Active |
| US6990380B2 | Substrate processing apparatus and information storage apparatus and method | Physics | 4 | Expired |
| US7605522B2 | Piezoelectric device | Chemistry; Metallurgy | 4 | Active |
| US6670287B2 | Coating method and coating apparatus | Performing Operations; Transporting | 3 | Expired |
| US7031792B2 | Processing apparatus and information storage apparatus and method | Physics | 2 | Expired |
| US7852059B2 | Power supply device | Physics | 2 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.