Cooling device and cooling method
US5941083A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 18, 1996 |
| Grant date | Aug 24, 1999 |
| Priority date | — |
| Expiry date | Jan 18, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D23/1919
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A cooling device for cooling an object to be processed to a target temperature comprises a plurality of contact members mounted on a placing table, for supporting the object such that the object opposes a top surface of the placing table with an interval, temperature sensors for outputting temperature information of the object supported by the contact members, a first cooling unit for cooling the placing table to a temperature lower than the target temperature to cool the object, a second cooling unit for heating the object cooled by the first cooling unit to a temperature almost equal to the target temperature, and a contrast circuit for performing a switching operation between cooling by the first cooling unit and heating by the second cooling unit on the basis of the temperature information from the temperature sensors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.