Tetsuya Sada
11Patents
8h-index
13Co-inventors
61Inventor score
Filing activity: Jan 18, 1996 → Mar 8, 2001
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6129546A | Heat process apparatus and heat process method | Electricity | 492 | Expired |
| US5941083A | Cooling device and cooling method | Physics | 32 | Expired |
| US6062240A | Treatment device | Emerging Cross-Sectional Technologies | 27 | Expired |
| US6159288A | Method and apparatus for cleaning treatment | Emerging Cross-Sectional Technologies | 27 | Expired |
| US6238511A | Method and apparatus for processing substrate | Emerging Cross-Sectional Technologies | 15 | Expired |
| US6216475A | Cooling device and cooling method | Physics | 15 | Expired |
| US6002572A | Processing apparatus and a processing method | Electricity | 8 | Expired |
| US6889764B2 | Cooling device and cooling method | Physics | 8 | Expired |
| US6456480B1 | Processing apparatus and a processing method | Electricity | 7 | Expired |
| US6391110B1 | Method and apparatus for cleaning treatment | Emerging Cross-Sectional Technologies | 7 | Expired |
| US6565656B2 | Coating processing apparatus | Performing Operations; Transporting | 6 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.