Double flexure support for stage drive coil
US5942871A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Apr 2, 1996 |
| Grant date | Aug 24, 1999 |
| Priority date | — |
| Expiry date | Apr 2, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T74/20207
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
In a stage for supporting an article, e.g. for a microlithographic system, the stage rides on a base and is driven in two orthogonal directions on the base along magnetic drive tracks by several drive coils riding in the drive tracks. Each drive coil, rather than being rigidly mounted to the stage, instead is connected to the stage by a tapered connecting member (beam). One end of each beam is connected to the stage by a double flexure assembly. The other end of each beam is connected to the drive coil by a similar double flexure assembly. Each double flexure assembly includes two orthogonal flexible members (stainless steel strips). Thus vibrations are reduced by use of this multiple flexible joints.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.