Martin E. Lee
43Patents
28h-index
22Co-inventors
85Inventor score
Filing activity: May 14, 1982 → Apr 11, 2012
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5528118A | Guideless stage with isolated reaction stage | Emerging Cross-Sectional Technologies | 460 | Expired |
| US5874820A | Window frame-guided stage mechanism | Emerging Cross-Sectional Technologies | 439 | Expired |
| US5744924A | Guideless stage with isolated reaction frame | Emerging Cross-Sectional Technologies | 136 | Expired |
| US5982128A | Lithography apparatus with movable stage and mechanical isolation of stage drive | Emerging Cross-Sectional Technologies | 128 | Expired |
| US5942871A | Double flexure support for stage drive coil | Emerging Cross-Sectional Technologies | 126 | Expired |
| US6281654A | Method for making apparatus with dynamic support structure isolation and exposure method | Emerging Cross-Sectional Technologies | 113 | Expired |
| US6271640A | Exposure apparatus having reaction frame | Emerging Cross-Sectional Technologies | 112 | Expired |
| US6008500A | Exposure apparatus having dynamically isolated reaction frame | Physics | 110 | Expired |
| US6020710A | Exposure method, and method of making exposure apparatus having dynamically isolated reaction frame | Emerging Cross-Sectional Technologies | 104 | Expired |
| US6150787A | Exposure apparatus having dynamically isolated reaction frame | Emerging Cross-Sectional Technologies | 103 | Expired |
| US6989647B1 | Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device | Electricity | 103 | Expired |
| US6175404A | Exposure apparatus having dynamically isolated reaction frame | Emerging Cross-Sectional Technologies | 102 | Expired |
| US6049186A | Method for making and operating an exposure apparatus having a reaction frame | Emerging Cross-Sectional Technologies | 102 | Expired |
| US6087797A | Exposure method, and method of making exposure apparatus having dynamically isolated reaction frame | Emerging Cross-Sectional Technologies | 102 | Expired |
| US6246202A | Method of making exposure apparatus with dynamically isolated reaction frame | Emerging Cross-Sectional Technologies | 101 | Expired |
| US6188195A | Exposure method, and method of making exposure apparatus having dynamically isolated support structure | Emerging Cross-Sectional Technologies | 101 | Expired |
| US6151105A | Exposure apparatus having dynamically isolated support structure | Emerging Cross-Sectional Technologies | 100 | Expired |
| US6316901A | Exposure apparatus and method utilizing isolated reaction frame | Emerging Cross-Sectional Technologies | 100 | Expired |
| US6683433B2 | Exposure apparatus and method utilizing isolated reaction frame | Emerging Cross-Sectional Technologies | 98 | Expired |
| US6747732B1 | Method of making exposure apparatus with dynamically isolated reaction frame | Emerging Cross-Sectional Technologies | 97 | Expired |
| US6927840B2 | Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device | Electricity | 95 | Expired |
| US6841965B2 | Guideless stage with isolated reaction stage | Emerging Cross-Sectional Technologies | 95 | Expired |
| US7365513B1 | Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device | Physics | 94 | Expired |
| USD692886S1 | Folio keyboard for tablet computer | General | 55 | Active |
| US4444492A | Apparatus for projecting a series of images onto dies of a semiconductor wafer | Physics | 55 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.