Source reagents for MOCVD formation of non-linear optically active metal borate films and optically active metal borate films formed therefrom
US5948322A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 10, 1997 |
| Grant date | Sep 7, 1999 |
| Priority date | — |
| Expiry date | Apr 10, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/3551
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An MOCVD precursor composition useful for MOCVD formation of a non-linear optically active metal borate thin film, comprising: (I) an organometallic source reagent for a metal reactively forming a non-linear optically active metal borate, and (II) an organoborate compound of the formula: B(OR).sub.3, wherein each R is independently selected from H, alkyl, aryl, alkaryl, arylalkyl, alkenyl, fluoroalkyl, fluoroaryl, fluoroaralkyl, fluoroalkaryl, trialkylsilyl, and C.sub.5 -C.sub.8 carbocylic groups, as the aforementioned borate source reagent. Such composition may be employed for forming a non-linear optically active metal borate thin film on a substrate, via depositing by CVD on said substrate a metal from the organometallic source reagent and a borate from the organoborate compound, to react the metal with the borate and yield the non-linear optically active metal borate on the substrate. Non-linear optically active devices, such as data storage devices, laser printers, display panels, and communications devices, can be fabricated using the composition and method of the invention.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.