Inventor · Readington, NJ, US

Gregory T. Stauf

19Patents
11h-index
39Co-inventors
72Inventor score

Filing activity: Jul 25, 1994 → Apr 11, 2014

Most-cited inventions

PatentTitleAreaCited byStatus
US5536323A Apparatus for flash vaporization delivery of reagents Emerging Cross-Sectional Technologies 193 Expired
US5711816A Source reagent liquid delivery apparatus, and chemical vapor deposition system comprising same Emerging Cross-Sectional Technologies 179 Expired
US5705443A Etching method for refractory materials Electricity 104 Expired
US6277436A Liquid delivery MOCVD process for deposition of high frequency dielectric materials Electricity 89 Expired
US5919522A Growth of BaSrTiO.sub.3 using polyamine-based precursors Chemistry; Metallurgy 84 Expired
US7838329B2 Antimony and germanium complexes useful for CVD/ALD of metal thin films Electricity 41 Active
US6900498B2 Barrier structures for integration of high K oxides with Cu and Al electrodes Electricity 18 Expired
US5948322A Source reagents for MOCVD formation of non-linear optically active metal borate films and optically active metal borate films formed therefrom Physics 18 Expired
US6599447B2 Zirconium-doped BST materials and MOCVD process forming same Electricity 17 Expired
US8008117B2 Antimony and germanium complexes useful for CVD/ALD of metal thin films Electricity 14 Active
US8603252B2 Cleaning of semiconductor processing systems Electricity 13 Active
US8268665B2 Antimony and germanium complexes useful for CVD/ALD of metal thin films Electricity 9 Active
US8709863B2 Antimony and germanium complexes useful for CVD/ALD of metal thin films Electricity 9 Active
US5932905A Article comprising a capacitor with non-perovskite Sr-Ba-Ti oxide dielectric thin film Emerging Cross-Sectional Technologies 9 Expired
US8288198B2 Low temperature deposition of phase change memory materials Chemistry; Metallurgy 8 Active
US8877549B2 Low temperature deposition of phase change memory materials Chemistry; Metallurgy 5 Active
US7858525B2 Fluorine-free precursors and methods for the deposition of conformal conductive films for nanointerconnect seed and fill Electricity 4 Active
US8679894B2 Low temperature deposition of phase change memory materials Chemistry; Metallurgy 0 Active
US9219232B2 Antimony and germanium complexes useful for CVD/ALD of metal thin films Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.