Patent · US Expired

Device and method for treating substrates in a fluid container

US5954068A · kind A · utility

3Cited by

13References

31Claims

0Family size

Assignees

Steag Micro Tech GmbH · DE
IMEC VZW · BE

Inventors

Martin Weber · Borgo San Lazzaro, DE
Marc Meuris · Keerbergen, BE
Ingrid Cornelissen · Hamont-Achel, BE

Key dates

Filing date	May 23, 1997
Grant date	Sep 21, 1999
Priority date	—
Expiry date	May 23, 2017

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/67057
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A device for treatment of substrates in a fluid container includes a container containing a treatment fluid and a substrate transport device moveable into a position above the container. The substrate transport device has at least one substrate holding device for securing the substrates in a first position and releasing the substrates in a second position. A third position may be provided in which a first set of substrates is secured and a second set of substrates is released. The substrate holding device is preferably at least one rotatable securing rod.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.