Patent · US Expired

Restoration of CD fidelity by dissipating electrostatic charge

US5977542A · kind A · utility

6Cited by
6References
15Claims
0Family size

Inventors

Key dates

Filing dateSep 11, 1997
Grant dateNov 2, 1999
Priority date—
Expiry dateSep 11, 2017

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG03F7/40
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

An integrated circuit manufacturing process for substantially eliminating negative electrostatic charge on a wafer surface after resist processing, comprising contacting the wafer with a dilute electrolyte solution having positive ions, restores the fidelity of CD's as measured by low-voltage SEM'S.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.