Subash Gupta
7Patents
6h-index
10Co-inventors
49Inventor score
Filing activity: Jun 7, 1995 → Nov 5, 1997
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5710067A | Silicon oxime film | Electricity | 116 | Expired |
| US5937319A | Method of making a metal oxide semiconductor (MOS) transistor polysilicon gate with a size beyond photolithography limitation by using polysilicidation and selective etching | Electricity | 21 | Expired |
| US5876903A | Virtual hard mask for etching | Physics | 20 | Expired |
| US5807790A | Selective i-line BARL etch process | Electricity | 13 | Expired |
| US5885902A | Integrated arc and polysilicon etching process | Emerging Cross-Sectional Technologies | 10 | Expired |
| US5763327A | Integrated arc and polysilicon etching process | Emerging Cross-Sectional Technologies | 8 | Expired |
| US5977542A | Restoration of CD fidelity by dissipating electrostatic charge | Physics | 6 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.