Excimer laser having power supply with fine digital regulation
US5982795A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 22, 1997 |
| Grant date | Nov 9, 1999 |
| Priority date | — |
| Expiry date | Dec 22, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03K17/80
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An excimer laser system having a laser chamber containing elongated electrodes and an excimer laser gas and a high voltage pulse power supply having fine digital regulation for supplying high voltage electrical pulses to the electrodes. The high voltage pulse power supply includes a power supply and a magnetic switch circuit for compressing and amplifying the output of the power supply. The power supply includes a silicon controlled rectifier which provides a direct current output to an inverter which converts the output of the silicon controlled rectifier to high frequency alternating current which is in turn amplified by a step up transformer. An output stage diode rectifier in combination with an inductor converts this high frequency high voltage current back to direct current. A control board comprising electronic circuits controls the power supply to provide high voltage pulses at a frequency of at least 1000 Hz. A voltage feedback circuit detects the voltage output of the output stage rectifier and provides a voltage output signal to the control board and a current feedback circuit detects charging current flowing in the output stage diode rectifier and provides a charging cu…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.