Method of exhaust control for spin-on films with reduced defects
US5985364A · kind A · utility
10Cited by
3References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 6, 1998 |
| Grant date | Nov 16, 1999 |
| Priority date | — |
| Expiry date | Apr 6, 2018 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB05D3/0493
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Spin-on coatings are applied by ramping-up the exhaust level in the spin coating chamber to achieve a predetermined minimum exhaustion level prior to accelerating rotation of the coating substrate to a high speed to effect spreading of the coating fluid. The resulting spun-on coatings exhibit reduced defect formation and reduced aerosol particle redeposition thereon.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.