Inventor · Fremont, CA, US

Jonathan B. Smith

9Patents
5h-index
14Co-inventors
52Inventor score

Filing activity: Apr 6, 1998 → Jun 15, 2005

Most-cited inventions

PatentTitleAreaCited byStatus
US6261963A Reverse electroplating of barrier metal layer to improve electromigration performance in copper interconnect devices Emerging Cross-Sectional Technologies 33 Expired
US6514844B1 Sidewall treatment for low dielectric constant (low K) materials by ion implantation Electricity 13 Expired
US6500755B2 Resist trim process to define small openings in dielectric layers Electricity 11 Expired
US5985364A Method of exhaust control for spin-on films with reduced defects Performing Operations; Transporting 10 Expired
US6294472A Dual slurry particle sizes for reducing microscratching of wafers Electricity 6 Expired
US6315637A Photoresist removal using a polishing tool Performing Operations; Transporting 5 Expired
US6406993B1 Method of defining small openings in dielectric layers Electricity 4 Expired
US7329582B1 Methods for fabricating a semiconductor device, which include selectively depositing an electrically conductive material Electricity 3 Active
US7737021B1 Resist trim process to define small openings in dielectric layers Electricity 2 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.