Magnetic carrier head for chemical mechanical polishing
US5989103A · kind A · utility
21Cited by
18References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 19, 1997 |
| Grant date | Nov 23, 1999 |
| Priority date | — |
| Expiry date | Sep 19, 2017 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B41/068
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A carrier head assembly including a drive shaft and a system flange connectable to the drive shaft where the system flange includes a number of magnetic plates. The carrier head assembly also includes a carrier head flange. The carrier head flange has more magnetic plates, these magnetic plates generally facing the previous plates. The magnetic plates magnetically engage to couple the carrier head flange to the system flange.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.