James Nystrom
8Patents
6h-index
16Co-inventors
56Inventor score
Filing activity: Oct 27, 1995 → Apr 5, 2005
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5899801A | Method and apparatus for removing a substrate from a polishing pad in a chemical mechanical polishing system | Performing Operations; Transporting | 43 | Expired |
| US5938507A | Linear conditioner apparatus for a chemical mechanical polishing system | Performing Operations; Transporting | 30 | Expired |
| US6135868A | Groove cleaning device for chemical-mechanical polishing | Performing Operations; Transporting | 28 | Expired |
| US6152806A | Concentric platens | Performing Operations; Transporting | 22 | Expired |
| US5989103A | Magnetic carrier head for chemical mechanical polishing | Performing Operations; Transporting | 21 | Expired |
| US6371836B1 | Groove cleaning device for chemical-mechanical polishing | Performing Operations; Transporting | 13 | Expired |
| US7108588B1 | System, method, and apparatus for wetting slurry delivery tubes in a chemical mechanical polishing process to prevent clogging thereof | Performing Operations; Transporting | 2 | Expired |
| US8500916B2 | Method for aligning wafers within wafer processing equipment | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.