Method of forming an electrostatic chuck suitable for magnetic flux processing
US5996218A · kind A · utility
158Cited by
12References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 4, 1996 |
| Grant date | Dec 7, 1999 |
| Priority date | — |
| Expiry date | Oct 4, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49117
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method of forming an electrostatic chuck 20 for holding substrates 42 in a process chamber 40 containing a magnetic flux 43 is described. The method comprises the steps of forming a base 22 for supporting a substrate 42. An insulator 26 with an electrode 24 therein, is formed on the base 22. A magnetic shunt 34 comprising a ferromagnetic material is formed either (i) on the base 22, or (ii) in the insulator 26, or (iii) directly below, and contiguous to, the base 22.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.