Inventor · Los Angeles, CA, US

Chandra Deshpandey

17Patents
12h-index
34Co-inventors
78Inventor score

Filing activity: Aug 12, 1985 → Feb 25, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US7544398B1 Controlled nano-doping of ultra thin films Chemistry; Metallurgy 409 Expired
US5592358A Electrostatic chuck for magnetic flux processing Emerging Cross-Sectional Technologies 297 Expired
US5996218A Method of forming an electrostatic chuck suitable for magnetic flux processing Emerging Cross-Sectional Technologies 158 Expired
US5055319A Controlled high rate deposition of metal oxide films Chemistry; Metallurgy 81 Expired
US5631803A Erosion resistant electrostatic chuck with improved cooling system Electricity 79 Expired
US5636098A Barrier seal for electrostatic chuck Electricity 49 Expired
US4931158A Deposition of films onto large area substrates using modified reactive magnetron sputtering Electricity 48 Expired
US5822171A Electrostatic chuck with improved erosion resistance Emerging Cross-Sectional Technologies 36 Expired
US6023405A Electrostatic chuck with improved erosion resistance Emerging Cross-Sectional Technologies 31 Expired
US6557248B1 Method of fabricating an electrostatic chuck Emerging Cross-Sectional Technologies 24 Expired
US6362097B1 Collimated sputtering of semiconductor and other films Electricity 21 Expired
US4714625A Deposition of films of cubic boron nitride and nitrides of other group III elements Chemistry; Metallurgy 16 Expired
US6535372B2 Controlled resistivity boron nitride electrostatic chuck apparatus for retaining a semiconductor wafer and method of fabricating the same Emerging Cross-Sectional Technologies 12 Expired
US6033483A Electrically insulating sealing structure and its method of use in a high vacuum physical vapor deposition apparatus Emerging Cross-Sectional Technologies 11 Expired
US6436509B1 Electrically insulating sealing structure and its method of use in a semiconductor manufacturing apparatus Emerging Cross-Sectional Technologies 3 Expired
US6821562B2 Method of forming an electrically insulating sealing structure for use in a semiconductor manufacturing apparatus Emerging Cross-Sectional Technologies 1 Expired
US12084763B2 Microstructure control of conducting materials through surface coating of powders Chemistry; Metallurgy 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.