Process for making bipolar having graded or modulated collector
US6001701A · kind A · utility
18Cited by
13References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 9, 1997 |
| Grant date | Dec 14, 1999 |
| Priority date | — |
| Expiry date | Jun 9, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S148/011
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A bipolar fabrication process, illustratively suited for integration into a conventional CMOS process to thereby form a BiCMOS integrated circuits is disclosed. The collector and base are formed through multiple implants and a single masking step to thereby provide a continuous low resistance collector region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.