Patent · US Expired

Method for characterizing interconnect timing characteristics

US6005829A · kind A · utility

38Cited by
9References
10Claims
0Family size

Assignee

Inventor

Key dates

Filing dateMay 21, 1998
Grant dateDec 21, 1999
Priority date
Expiry dateMay 21, 2018

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01R31/318516
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A reference ring oscillator circuit (RROC) is used to determine timing characteristics of a test interconnect structure in an integrated circuit. The RROC includes an odd number of inverters coupled together in a ring manner and has defined test segments at which a test interconnect can be loaded. Reference timing characteristics of the unloaded RROC are determined according to a calibration method including the steps of: (a) directly measuring signal propagation delay through each segment of the RROC; (b) modeling each test segment using an RC tree type reference circuit model having reference elements; (c) simulating the reference circuit model to provide a functional relationship between two reference capacitors; (d) defining upper and lower bounds for propagation delay through the test segment in terms of the reference elements; (e) determining values for the reference capacitor elements; and (f) measuring a reference frequency of oscillation of the unloaded RROC. After calibration, a test frequency of oscillation of the RROC is measured while a test interconnect structure is loaded onto a test segment. The period of the reference frequency is subtracted from the period of the …

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.