Substrate processing apparatus
US6007629A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 23, 1996 |
| Grant date | Dec 28, 1999 |
| Priority date | — |
| Expiry date | Dec 23, 2016 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB05C11/08
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A chemical supplied onto a substrate is contained in a chemical container. A chemical cooling unit keeps the chemical contained in the chemical container cooled to a proper temperature for storage. A chemical pressure-transferring portion causes the chemical to flow from the chemical container into a chemical introducing pipe. A chemical temperature controller portion changes the temperature of the chemical guided by the chemical introducing pipe to a proper temperature for application on a substrate. The chemical brought to the proper application temperature is guided to a chemical dispensing unit, which dispenses the chemical onto a substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.