Masami Ohtani
44Patents
20h-index
48Co-inventors
85Inventor score
Filing activity: Jan 29, 1979 → Dec 12, 2008
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5989342A | Apparatus for substrate holding | Emerging Cross-Sectional Technologies | 493 | Expired |
| US6051101A | Substrate processing apparatus, substrate transport apparatus and substrate transfer apparatus | Electricity | 91 | Expired |
| US5785068A | Substrate spin cleaning apparatus | Emerging Cross-Sectional Technologies | 75 | Expired |
| US5963753A | Substrate processing apparatus | Electricity | 74 | Expired |
| US6260562A | Substrate cleaning apparatus and method | Emerging Cross-Sectional Technologies | 58 | Expired |
| US4923054A | Wafer transfer apparatus having an improved wafer transfer portion | Emerging Cross-Sectional Technologies | 58 | Expired |
| US4359875A | Automotive air conditioning apparatus | Mechanical Engineering; Lighting; Heating | 54 | Expired |
| US6060697A | Substrate processing apparatus having regulated power consumption and method therefor | Physics | 43 | Expired |
| US6099643A | Apparatus for processing a substrate providing an efficient arrangement and atmospheric isolation of chemical treatment section | Emerging Cross-Sectional Technologies | 39 | Expired |
| US5322079A | Substrate holding apparatus of a simple structure for holding a rotating substrate, and a substrate processing apparatus including the substrate holding apparatus | Electricity | 35 | Expired |
| US6062852A | Substrate heat-treating apparatus | Electricity | 33 | Expired |
| US6371713B1 | Substrate processing apparatus | Emerging Cross-Sectional Technologies | 28 | Expired |
| US4935981A | Cleaning apparatus having a contact buffer apparatus | Electricity | 28 | Expired |
| US5765072A | Treating solution supplying method and substrate treating apparatus | Physics | 27 | Expired |
| US6159291A | Substrate treating apparatus | Performing Operations; Transporting | 27 | Expired |
| US6286525A | Substrate cleaning apparatus and method | Emerging Cross-Sectional Technologies | 27 | Expired |
| US5647083A | Apparatus for cleaning substrates and methods for attaching/detaching and cleaning brushes of such apparatus | Performing Operations; Transporting | 26 | Expired |
| US5829087A | Substrate spin cleaning apparatus | Electricity | 26 | Expired |
| US6151744A | Method of and apparatus for cleaning substrate | Electricity | 25 | Expired |
| US6007629A | Substrate processing apparatus | Performing Operations; Transporting | 21 | Expired |
| US6896466B2 | Substrate processing apparatus | Emerging Cross-Sectional Technologies | 20 | Expired |
| US5359785A | Substrate transport apparatus | Electricity | 20 | Expired |
| US6790287B2 | Substrate processing apparatus, substrate inspection method and substrate processing system | Electricity | 19 | Expired |
| US6790286B2 | Substrate processing apparatus | Emerging Cross-Sectional Technologies | 18 | Expired |
| US5308210A | Interface apparatus for transporting substrates between substrate processing apparatus | Emerging Cross-Sectional Technologies | 18 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.