Probe apparatus and a method for polishing a probe
US6024629A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jan 21, 1998 |
| Grant date | Feb 15, 2000 |
| Priority date | — |
| Expiry date | Jan 21, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2851
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probe apparatus according to the present invention comprises a stage carrying an object of inspection thereon and rotatable and movable in the horizontal and vertical directions, a probe located over the stage and adapted to be brought into contact with the object of inspection on the stage in order to subject the object to electrical inspection, a polisher carrying section attached to the stage and capable of carrying thereon a polisher for polishing the probe, a storage mechanism for storing the polisher, and a transportation mechanism for transporting the polisher between the storage mechanism and the polisher carrying section.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.