Encapsulated micro-relay modules and methods of fabricating same
US6025767A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 5, 1996 |
| Grant date | Feb 15, 2000 |
| Priority date | — |
| Expiry date | Aug 5, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H2050/025
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A micro-relay module includes a substrate and a lid in spaced apart relation, and a solder ring which bonds the lid to the substrate to define a chamber therebetween. A micromachined relay is integrally formed on the substrate or on the lid within the chamber. A gas is contained in the chamber at a gas pressure which is above atmospheric pressure. Input/output pads are included outside the chamber and electrically connected to the micromachined relay. Large numbers of encapsulated modules may be fabricated on a single substrate by integrally forming an array of relays on a face of a first substrate. A second substrate is placed adjacent the face with a corresponding array of solder rings therebetween, such that a respective solder ring surrounds a respective relay. The solder rings are reflowed in a gas atmosphere which is above atmospheric pressure to thereby form an array of high pressure gas encapsulating chambers. The first and second substrates are then singulated for form a plurality of individual micro-relay modules.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.