Fluid storage and dispensing vessel with modified high surface area solid as fluid storage medium
US6027547A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 18, 1998 |
| Grant date | Feb 22, 2000 |
| Priority date | — |
| Expiry date | May 18, 2018 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01D2259/4541
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A fluid storage and dispensing system, comprising: a fluid storage and dispensing vessel constructed and arranged for selective dispensing of fluid therefrom; a solid-phase support in the vessel; and an affinity medium on the solid-phase support, wherein the affinity medium reversibly takes up the fluid when contacted therewith, and from which the fluid is disengagable under dispensing conditions. The affinity medium may be a liquid, oil, gel, or solid (porous solid, thin film solid, or bulk solid). The system of the invention may be employed for the storage and dispensing of fluids such as hydride, halide and dopant gases for manufacturing of semiconductor products.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.