Automatic fluorine control system
US6028880A · kind A · utility
135Cited by
17References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 2, 1998 |
| Grant date | Feb 22, 2000 |
| Priority date | — |
| Expiry date | Jul 2, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/225
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An excimer laser system with a fluorine control having a fixed volume inject bottle in which fluorine is injected prior to it being injected into the laser chamber. A manifold and feedback control system is provided to permit precise injection at rates approaching continuous fluorine injection. The system permits the laser to be operated in a small sweet spot as measured by a narrow range of charging voltage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.