Automatic defect reclassification of known propagator defects
US6035244A · kind A · utility
16Cited by
4References
2Claims
0Family size
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Key dates
| Filing date | Oct 22, 1997 |
| Grant date | Mar 7, 2000 |
| Priority date | — |
| Expiry date | Oct 22, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06F11/2268
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A defect management system with a method to update a database with defect data concerning propagator defect data. Defect data obtained from each layer formed on a semiconductor wafer is stored in a relational database. Defect data determined in a current layer to be defect data for a defect observed in a previous layer is defined as data concerning a propagator defect. Propagator defect data is used to update the data in the database relating to the previous layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.