Carrier for double-side polishing
US6042688A · kind A · utility
23Cited by
2References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 25, 1998 |
| Grant date | Mar 28, 2000 |
| Priority date | — |
| Expiry date | Jun 25, 2018 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B37/28
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A carrier for double-side polishing, which has a polishing pad dressing function as well as a polishing function, so that it can do removal of matter stuck to polishing pads and wear correction thereof concurrently with polishing and ensure stable work polishing accuracy. A resin-coated metal or resin ring is provided around the outer periphery of a carrier portion having work retainer holes and abrasive feed holes, and projections are formed on the upper and lower surfaces of the ring. The projections are cylindrical, triangular pyramidal, quadrangular pyramidal or conical, or they may be irregular projections formed by blasting.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.