Scanning electron microscope
US6043491A · kind A · utility
23Cited by
6References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 12, 1998 |
| Grant date | Mar 28, 2000 |
| Priority date | — |
| Expiry date | Aug 12, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/0475
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A scanning electron microscope in the present invention, by employing a retarding method and suppressing interferences between an electron beam and secondary electrons or back scattered electrons, makes it possible to obtain a clearer SEM image with a higher resolution. In the scanning electron microscope in the present invention, a shield electrode 117 is provided for shielding the electron beam 104 from electric fields of an energy analyzer 118 and a detector 121, and the energy analyzer 118 and the detector 121 are located in contact with an electron beam aperture 115 and the shield electrode 117.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.