Carrier head to apply pressure to and retain a substrate
US6050882A · kind A · utility
50Cited by
4References
15Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 10, 1999 |
| Grant date | Apr 18, 2000 |
| Priority date | — |
| Expiry date | Jun 10, 2019 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B37/30
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A carrier head for a chemical mechanical polishing apparatus has a plurality of independently movable rods. The rods both apply pressure a substrate and surround the substrate to provide a retainer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.