Hung Chih Chen
174Patents
29h-index
135Co-inventors
93Inventor score
Filing activity: Dec 10, 1985 → Feb 22, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6183354A | Carrier head with a flexible membrane for a chemical mechanical polishing system | Performing Operations; Transporting | 157 | Expired |
| US6159079A | Carrier head for chemical mechanical polishing a substrate | Performing Operations; Transporting | 106 | Expired |
| US5957751A | Carrier head with a substrate detection mechanism for a chemical mechanical polishing system | Performing Operations; Transporting | 101 | Expired |
| US6080050A | Carrier head including a flexible membrane and a compliant backing member for a chemical mechanical polishing apparatus | Performing Operations; Transporting | 84 | Expired |
| US5993302A | Carrier head with a removable retaining ring for a chemical mechanical polishing apparatus | Performing Operations; Transporting | 79 | Expired |
| US6132298A | Carrier head with edge control for chemical mechanical polishing | Performing Operations; Transporting | 78 | Expired |
| US6857945B1 | Multi-chamber carrier head with a flexible membrane | Performing Operations; Transporting | 69 | Expired |
| US6241596A | Method and apparatus for chemical mechanical polishing using a patterned pad | Performing Operations; Transporting | 66 | Expired |
| US6210255A | Carrier head for chemical mechanical polishing a substrate | Performing Operations; Transporting | 65 | Expired |
| US6277014A | Carrier head with a flexible membrane for chemical mechanical polishing | Performing Operations; Transporting | 62 | Expired |
| US4617607A | High pressure capacitive transducer | Physics | 59 | Expired |
| US7255771B2 | Multiple zone carrier head with flexible membrane | Performing Operations; Transporting | 58 | Expired |
| US6162116A | Carrier head for chemical mechanical polishing | Performing Operations; Transporting | 58 | Expired |
| US6146259A | Carrier head with local pressure control for a chemical mechanical polishing apparatus | Performing Operations; Transporting | 53 | Expired |
| US6050882A | Carrier head to apply pressure to and retain a substrate | Performing Operations; Transporting | 50 | Expired |
| US6217426A | CMP polishing pad | Emerging Cross-Sectional Technologies | 46 | Expired |
| US6431968B1 | Carrier head with a compressible film | Performing Operations; Transporting | 46 | Expired |
| US6241593A | Carrier head with pressurizable bladder | Performing Operations; Transporting | 44 | Expired |
| US6722965B2 | Carrier head with flexible membranes to provide controllable pressure and loading area | Performing Operations; Transporting | 42 | Expired |
| US6450868B1 | Carrier head with multi-part flexible membrane | Mechanical Engineering; Lighting; Heating | 38 | Expired |
| US6390908B1 | Determining when to replace a retaining ring used in substrate polishing operations | Performing Operations; Transporting | 38 | Expired |
| US7166016B1 | Six headed carousel | Performing Operations; Transporting | 35 | Expired |
| US6436828B1 | Chemical mechanical polishing using magnetic force | Performing Operations; Transporting | 33 | Expired |
| US6663466B2 | Carrier head with a substrate detector | Electricity | 32 | Expired |
| US6361420B1 | Method of chemical mechanical polishing with edge control | Performing Operations; Transporting | 32 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.