Vacuum processing system with turbo-axial fan in clean-air supply system of front end environment
US6050891A · kind A · utility
26Cited by
5References
15Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 6, 1998 |
| Grant date | Apr 18, 2000 |
| Priority date | — |
| Expiry date | Feb 6, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/139
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A turbo-axial fan assembly is provided for a clean-air supply system of a substrate handling module of a vacuum processing system. The turbo-axial fan assembly has one or more turbo-axial fans for generating airflow through the substrate handling environment. The turbo-axial fans have tunable vanes for controlling the speed of the airflow and efficiently using the available power.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.