Substrate processing apparatus having regulated power consumption and method therefor
US6060697A · kind A · utility
43Cited by
6References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 13, 1998 |
| Grant date | May 9, 2000 |
| Priority date | — |
| Expiry date | Mar 13, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D23/1951
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A substrate processing apparatus reduces an instantaneous maximum power consumption at turn-on. Power receiving parts of a plurality of processing units are connected to one end of a turn-on switch respectively through switches. The other end of the turn-on switch is connected to an external power source through a breaker. Timer values are set in advance in the timers, respectively. When the turn-on switch is turned on, the timers turn on the associated switches respectively after times which are defined by the timer values, whereby the processing units are provided with electric power, each with a delay of a constant time.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.