Pressure sensor

US6062088A · kind A · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Kurt Ingrisch · Reutlingen, DE
• Kurt Weiblen · Metzingen, DE
• Hubert Benzel · Neckartenzlingen, DE
• Botho Ziegenbein · Reutlingen, DE
• Hans-Peter Trah · Reutlingen, DE
• Andreas Duell · Stuttgart, DE
• Karl Bender · Lörrach, DE
• Jochen Franz · Reutlingen, DE

Key dates

• Filing date: Mar 3, 1999
• Grant date: May 16, 2000
• Expiry date: Mar 3, 2019

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L9/0052
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A pressure sensor includes a metallic membrane and a frame. For detecting the deflection of the membrane, a silicon bridge element having piezoresistive resistor elements is arranged on the membrane and the frame.