Substrate transfer system for semiconductor processing equipment
US6068441A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 21, 1997 |
| Grant date | May 30, 2000 |
| Priority date | — |
| Expiry date | Nov 21, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/141
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A system for facilitating wafer transfer comprises a susceptor unit consisting of an inner susceptor section which rests within an outer susceptor section. A vertically movable and rotatable support spider located beneath the susceptor unit can rotate into positions to engage either the inner or the outer susceptor sections. When the inner section is engaged, the support spider lifts the inner section vertically out of the outer section. When the outer section is engaged, the support spider raises and lowers the entire susceptor unit. A fork type robotic arm end effector permits wafer pick up and unloading by the inner susceptor section.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.