Dennis L. Goodwin
24Patents
14h-index
31Co-inventors
81Inventor score
Filing activity: Jul 12, 1982 → Jul 28, 2011
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5997588A | Semiconductor processing system with gas curtain | Emerging Cross-Sectional Technologies | 589 | Expired |
| US6068441A | Substrate transfer system for semiconductor processing equipment | Emerging Cross-Sectional Technologies | 501 | Expired |
| US4828224A | Chemical vapor deposition system | Emerging Cross-Sectional Technologies | 485 | Expired |
| US5080549A | Wafer handling system with Bernoulli pick-up | Emerging Cross-Sectional Technologies | 103 | Expired |
| US5324155A | Wafer handling system with bernoulli pick-up | Emerging Cross-Sectional Technologies | 72 | Expired |
| US6293749A | Substrate transfer system for semiconductor processing equipment | Emerging Cross-Sectional Technologies | 54 | Expired |
| US5435682A | Chemical vapor desposition system | Emerging Cross-Sectional Technologies | 50 | Expired |
| US5020475A | Substrate handling and transporting apparatus | Chemistry; Metallurgy | 43 | Expired |
| US5092728A | Substrate loading apparatus for a CVD process | Chemistry; Metallurgy | 42 | Expired |
| US6183183A | Dual arm linear hand-off wafer transfer assembly | Emerging Cross-Sectional Technologies | 32 | Expired |
| US7018479B2 | Rotating semiconductor processing apparatus | Electricity | 21 | Expired |
| US4874464A | Process for epitaxial deposition of silicon | Emerging Cross-Sectional Technologies | 19 | Expired |
| US5156521A | Method for loading a substrate into a GVD apparatus | Chemistry; Metallurgy | 18 | Expired |
| US6161311A | System and method for reducing particles in epitaxial reactors | Emerging Cross-Sectional Technologies | 17 | Expired |
| US6331023A | Gridded substrate transport spatula | Emerging Cross-Sectional Technologies | 12 | Expired |
| US4774386A | Spanning device | Emerging Cross-Sectional Technologies | 9 | Expired |
| US6435809B2 | Dual arm linear hand-off wafer transfer assembly | Emerging Cross-Sectional Technologies | 7 | Expired |
| US6554905B1 | Rotating semiconductor processing apparatus | Electricity | 7 | Expired |
| US6394440B1 | Dual orientation leveling platform for semiconductor apparatus | Electricity | 6 | Expired |
| US6435799B1 | Wafer transfer arm stop | Emerging Cross-Sectional Technologies | 5 | Expired |
| US10138551B2 | Substrate processing apparatuses and systems | Electricity | 3 | Active |
| US6550158B2 | Substrate handling chamber | Emerging Cross-Sectional Technologies | 2 | Expired |
| US6617247B2 | Method of processing a semiconductor wafer in a reaction chamber with a rotating component | Electricity | 2 | Expired |
| US9175419B2 | Apparatus for delivering precursor gases to an epitaxial growth substrate | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.