Process for fabricating layered superlattice materials and making electronic devices including same
US6072207A · kind A · utility
17Cited by
6References
11Claims
0Family size
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Key dates
| Filing date | Mar 17, 1995 |
| Grant date | Jun 6, 2000 |
| Priority date | — |
| Expiry date | Mar 17, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/045
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A liquid precursor containing a metal is applied to a substrate, RTP baked, and annealed to form a layered superlattice material. Special polyoxyalkylated precursor solutions are designed to optimize polarizability of the corresponding metal oxide materials by adding dopants including stoichiometric excess amounts of bismuth and tantalum. The RTP baking process is especially beneficial in optimizing the polarizability of the resultant metal oxide.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.