Method and system for supplying semiconductor source material

US6089285A · kind A · utility

Assignee

• MEMC Electronic Materials, Inc. · US

Inventors

• Mark A. Destefano · Collegeville, US
• James Dean Eoff · New Florence, US
• Thomas H. Schulte · Saint Peters, US
• John M. Anderson · Villa Rica, US
• Eng Chin Yau · Holden, US
• Donald R. Ruggeri · Chesterfield, US
• David W. Baldwin · Saint Peters, US
• Charles Lawrence Badino · Chesterfield, US

Key dates

• Filing date: Apr 29, 1998
• Grant date: Jul 18, 2000
• Expiry date: Apr 29, 2018

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C30B15/00
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A method of supplying source material in a crystal puller used to grow single crystal semiconductor material. Generally, the method includes receiving a bulk container of the source material at a facility having the crystal puller and configuring the bulk container for gravity feed of the source material from the container. The bulk container is transported to the crystal puller and a predetermined quantity of source material is dispensed directly from the bulk container into the crystal puller. Apparatus and a system for use in supplying source material are also disclosed.